Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

Aceasta carte discuta despre proiectarea fizica si sinteza masca a litografiei dirijate de auto-asamblare (DSAL). Acopera fundalul de baza al tehnologiei DSAL, optimizarile de proiectare fizica, cum ar fi plasarea si redundantele prin insertie, sinteza masca DSAL, precum si verificarea acesteia.