Scanning Electron Microscopy

Fine focused electron and ion beams constitute(s) an inevitable part of methods and instruments employed in various science fields. SEMs are well instrumented and supplemented with advanced techniques and methods and thereby present endless possibilities in the areas of quantitative measurement of object topologies, surface imaging, performing elemental analysis and local electrophysical characteristics of semiconductor structures. Creation of micro and nanostructures involves extensive use of fine focused e-beam. This book focuses on various issues concerned with scanning electron microscopy, covering both theoretical and practical aspects. Numerous topics are organized under two sections, "Material Science" and "Nanostructured Materials for Electronic Industry." This book includes contributions by renowned researchers and experts in this field.

Razele de electroni si ioni concentrate fin constituie o parte inevitabila a metodelor si instrumentelor utilizate in diverse domenii stiintifice. SEM-urile sunt bine instrumentate si completate cu tehnici si metode avansate si, prin urmare, prezinta posibilitati nesfarsite in domeniile masurarii cantitative a topologiilor obiectelor, imagistica suprafetei, efectuarea analizei elementare si a caracteristicilor electrofizice locale ale structurilor semiconductoare.